| 摘要 |
PROBLEM TO BE SOLVED: To provide a helium liquefier, in which when a plurality of helium liquefying machines are installed for one storage tank, running states of the respective helium liquefying machines can be continued respectively in predetermined stable states.SOLUTION: A helium liquefier is configured in such a manner that, in one liquid helium storage tank, there are installed a plurality of helium liquefying machines each including a return amount adjusting means for adjusting, in accordance with a pressure in the liquid helium storage tank, the amount of helium returning to a low-pressure return path from: a compressor; a high-pressure path; a heat exchanger; an expansion turbine; a JT (Joule-Thomson expansion) valve; a liquid helium introduction path; the liquid helium storage tank; the low-pressure return path; and an inside of the liquid helium storage tank. In the liquid helium storage tank 11, a partition plate 12 partitioning a gas phase in the liquid helium storage tank is disposed to achieve a compartment formation of a plurality of gas phase chambers 13a and 13b, and to a gas phase chamber formed by the partitioning, the liquid helium introduction path 28, the low-pressure return path 24 and the return amount adjusting means 29 are disposed corresponding to the liquefying machine 21, and to a gas phase chamber formed by the partitioning, the liquid helium introduction path 38, the low-pressure return path 34 and the return amount adjusting means 39 are disposed corresponding to the liquefying machine 31. |
