搬送装置および搬送方法,申请号JP20120029088-传众专利搜索

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发明名称	搬送装置および搬送方法
摘要
申请公布号	JP5924018(B2)	申请公布日期	2016.05.25
申请号	JP20120029088	申请日期	2012.02.14
申请人	株式会社ＩＨＩ	发明人	松尾研吾;王鵬
分类号	B65G47/52;B65G49/06;B65G51/03;H01L21/677	主分类号	B65G47/52
代理机构		代理人
主权项
地址

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