APPARATUS AND METHOD FOR SPLITTING SUBSTRATES

摘要

The present invention provides a technology related to an apparatus and a method for distributing substrates. The apparatus for distributing substrates according to the present invention includes a plurality of sliders configured to be stacked and accommodated and a driving unit configured to be connected to at least one of the sliders and transfer the connected slider in one direction. The slider transferred in one direction is configured to transfer at least one substrate within a first magazine corresponding thereto to a second magazine adjacent to the first magazine. According to the present invention, work efficiency can be improved.