发明名称 LASER CUTTING DEVICE
摘要 A laser cutting device is disclosed. The laser cutting device includes: a laser beam generating unit for emitting a laser beam; an optical system installed on a propagation path of the laser beam; a laser main body for providing a path through which the laser beam passing through the optical system travels, toward a substrate; a suctioning unit which is coupled to a header of the laser main body and suctions foreign matters; and a collecting unit which is connected to the suctioning unit and collects discharged foreign matters. The foreign matters are discharged into the collecting unit along a curved surface formed inside the suctioning unit. The laser cutting device according to an aspect of the present invention can easily remove foreign matters produced during cutting of a substrate.
申请公布号 KR20160056464(A) 申请公布日期 2016.05.20
申请号 KR20140156234 申请日期 2014.11.11
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 MOON, BYEONG NAM;LEE, JAE PIL;YU, MYEONG LYEOL;LEE, WON YOUNG
分类号 H01L51/56;H01L21/268;H01L21/301 主分类号 H01L51/56
代理机构 代理人
主权项
地址