| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser scribing method suitable for cutting a flat plate material such as ceramics or glass in spite of being a simple method and a flat plate material having dicing grooves.SOLUTION: A laser scribing method for scanning the surface of a flat plate material 5 with laser beams to form dicing grooves enables deep parts B to be formed locally in the groove length direction with intervals by locally reducing scan rate of the laser beams, with a ratio L2/L1 ranging over 0.005 or more and 0.5 or less when the full length including shallow parts and deep parts of the dicing grooves are L1, and the length of the deepest part is L2, and a ratio d2/d1 ranging over 1.5 or more and 5.0 or less when the depth of the shallowest part of the dicing grooves is d1, and the depth of the deepest part is d2.SELECTED DRAWING: Figure 1 |
