| 摘要 |
PROBLEM TO BE SOLVED: To stabilize a vaporization rate of a raw material and achieve a high vaporization efficiency, in supplying the raw material obtained by sublimation of a solid raw material to a consumption zone together with a carrier gas.SOLUTION: A solid raw material is put in a raw material vessel 3 and heated up to a sublimation temperature or higher by an infrared lamp 6. A carrier gas is supplied to the raw material vessel 3 and the sublimated gas is supplied with the carrier gas to a consumption zone, a deposition process unit 2. Since the solid raw material is directly heated by infrared radiation, temperature difference between a center region and a peripheral region in the raw material vessel 3 is suppressed. A vaporization rate of the raw material is thus stabilized and a high vaporization efficiency is achieved. The raw material gas obtained at a stable vaporization rate of the raw material is supplied to the deposition process unit 2 and thus gives a thin film of stable film quality in the deposition process unit 2.SELECTED DRAWING: Figure 1 |
