发明名称 METHOD OF ACCURATE THICKNESS MEASUREMENT OF BORON CARBIDE COATING ON COPPER FOIL
摘要 A method is disclosed of measuring the thickness of a thin coaling on a substrate comprising dissolving the coating and substrate in a reagent and using the post-dissolution concentration of the coating in the reagent to calculate an effective thickness of the coating. The preferred method, includes measuring non-conducting films on flexible and rough substrates, but other kinds of thin films can be measure by matching a reliable film-substrate dissolution technique. One preferred method Includes determining the thickness of Boron Carbide films deposited on copper foil.. The preferred method uses a standard technique known as inductively coupled plasma optical emission spectroscopy (ICPOES) to measure boron concentration in a liquid sample prepared by dissolving boron carbide films and the Copper substrates, preferably using a chemical etch known as eerie ammonium, nitrate (CAN), Measured boron concentration, values can then be calculated.
申请公布号 WO2016077516(A1) 申请公布日期 2016.05.19
申请号 WO2015US60263 申请日期 2015.11.12
申请人 PROPORTIONAL TECHNOLOGIES, INC. 发明人 LACY, JEFFREY, L.;REGMI, MURARI
分类号 C23C14/14;C23C14/56;C23C16/06;G01T1/185 主分类号 C23C14/14
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