发明名称 |
METHOD OF ACCURATE THICKNESS MEASUREMENT OF BORON CARBIDE COATING ON COPPER FOIL |
摘要 |
A method is disclosed of measuring the thickness of a thin coaling on a substrate comprising dissolving the coating and substrate in a reagent and using the post-dissolution concentration of the coating in the reagent to calculate an effective thickness of the coating. The preferred method, includes measuring non-conducting films on flexible and rough substrates, but other kinds of thin films can be measure by matching a reliable film-substrate dissolution technique. One preferred method Includes determining the thickness of Boron Carbide films deposited on copper foil.. The preferred method uses a standard technique known as inductively coupled plasma optical emission spectroscopy (ICPOES) to measure boron concentration in a liquid sample prepared by dissolving boron carbide films and the Copper substrates, preferably using a chemical etch known as eerie ammonium, nitrate (CAN), Measured boron concentration, values can then be calculated. |
申请公布号 |
WO2016077516(A1) |
申请公布日期 |
2016.05.19 |
申请号 |
WO2015US60263 |
申请日期 |
2015.11.12 |
申请人 |
PROPORTIONAL TECHNOLOGIES, INC. |
发明人 |
LACY, JEFFREY, L.;REGMI, MURARI |
分类号 |
C23C14/14;C23C14/56;C23C16/06;G01T1/185 |
主分类号 |
C23C14/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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