| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing liquid composition for a magnetic disc substrate which can prevent abrasion of a polishing pad without worsening scratch and nano projection defects on the substrate surface after polishing.SOLUTION: A polishing liquid composition for aluminum alloy substrate plated Ni-P contains silica particles, acid, and a copolymer having a constitutional unit derived from (meth)acrylic acid or its salt, and a constitutional unit derived from ethylenic unsaturated sulfone acid compound having a hydroxy group or its salt.SELECTED DRAWING: None |
