EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD OF GENERATING EXTREME ULTRA-VIOLET LIGHT

摘要

An extreme ultraviolet (EUV) light source device includes a source droplet generator for generating source droplets as a target source for generating extreme ultraviolet (EUV) light and for injecting the source droplets to a collector, a light irradiator for directing a detection light to an injection path of the source droplets, a light detector for detecting the detection light blocked by the source droplet, and a source droplet controller electrically connected to the light detector and the source droplet generator for analyzing the detection light to determine whether a satellite of the source droplet is generated or to determine a size of the generated satellite and for controlling a formation of a stream of source droplets based on the determination result.

主权项

1. An extreme ultraviolet (EUV) light source device, comprising:
a source droplet generator configured to generate source droplets as a target source for generating extreme ultraviolet (EUV) light and configured to inject the source droplets to a collector; a light irradiator configured to direct a detection light to an injection path of the source droplets; a light detector configured to detect the detection light blocked by a respective source droplet; and a source droplet controller electrically connected to the light detector and the source droplet generator and configured to:
analyze the detection light to determine whether a satellite of the source droplet is generated or to determine a size of the generated satellite; andcontrol a formation of a stream of source droplets based on the determination result.