Strain Mapping in TEM Using Precession Electron Diffraction

摘要

A sample material is scanned with a transmission electron microscope (TEM) over multiple steps having a predetermined size at a predetermined angle. Each scan at a predetermined step and angle is compared to a template, wherein the template is generated from parameters of the material and the scanning. The data is then analyzed using local mis-orientation mapping and/or Nye's tensor analysis to provide information about local strain states.

主权项

1. A method for strain mapping a material rising the steps of:
scanning a sample of a material with a transmission electron microscope (TEM), wherein the scanning of the material occurs over multiple steps having a step size and at a beam precession angle; comparing each scan at each step and beam precession angle to a template to produce data, wherein the template is generated from parameters of the material and information from the scanning step; analyzing the data using local mis-orientation mapping analysis or Nye to analysis; and producing a local strain map of the sample.