Control Of Workpiece Temperature Via Backside Gas Flow

摘要

A system and method for modulating and controlling the localized temperature of a workpiece during processing is disclosed. The system uses a platen having one or more walls, defining a plurality of discrete regions on the top surface of the platen. When a workpiece is disposed on the platen, a plurality of compartments is created, where each compartment is defined by the back side of the workpiece and a respective region of the platen. The pressure of back side gas in each of the compartments can be individually controlled. The pressure of back side gas determines the amount of heat that is transferred from the workpiece to the platen. By locally regulating the pressure of back side gas, different regions of the workpiece can be maintained at different temperatures. In some embodiments, a plurality of valves is used to control the flow rate to the compartments.

主权项

1. A system for controlling a temperature of a plurality of regions in a workpiece during processing, comprising:
a platen comprising a top surface having one or more walls defining a plurality of discrete regions, wherein a plurality of compartments are created by the plurality of discrete regions when a workpiece is disposed on the platen, each compartment corresponding to a region of the workpiece, wherein each of the plurality of compartments has an associated opening; a plurality of conduits, each of the plurality of conduits in communication with a respective opening; a plurality of valves, each valve in communication with a respective one of the plurality of conduits and in communication with a back side gas supply system; and a controller, in communication with the plurality of valves, to independently control a flow rate through each of the plurality of valves so as to maintain a pressure within each of the plurality of compartments, wherein the pressure is selected so as to maintain a temperature of each region of the workpiece corresponding to a respective compartment.