SURFACE PLASMONIC SENSOR CHIP AND MANUFACTURING METHOD FOR THE SAME

摘要

Provided is a surface plasmonic sensor chip. The surface plasmonic sensor chip comprises: a silicon oxide thin film; a metal thin film placed on an upper part of the silicon oxide thin film; a sensing film placed on the upper part of the metal thin film; a gas-permeable adhesive placed on the upper part of the sensing film, and formed around a center part of the sensing film except for the center part; and a support substrate placed on the upper part of the gas-permeable adhesive. As such, the present invention is capable of improving a performance of a surface plasmonic sensor.