APPARATUS AND METHOD FOR HOLDING A WORKPIECE

摘要

The present invention relates to an apparatus for holding a workpiece to allow dicing of the workpiece. The apparatus comprises a base, an inner support member and an outer support member that is more deformable than the inner support member and arranged along a periphery of the inner support member. In use, air is extracted from suction holes of the inner support member, urging the workpiece against the inner and outer support members. Upon such urging, the outer support member deforms to seal a gap between the workpiece and the inner support member. This helps to increase the magnitude of the forces holding the workpiece against the inner support member.

主权项

1. An apparatus for holding a workpiece to allow dicing of the workpiece, the apparatus comprising:
an inner support member comprising suction holes, the inner support member being configured to support the workpiece; a base comprising a cavity connectable to a vacuum source; and an outer support member configured to support the workpiece, the outer support member being more deformable than the inner support member and the vacuum source being operative to extract air from the suction holes via the cavity to urge the workpiece against the inner and outer support members; wherein the outer support member is arranged along a periphery of the inner support member and is configured to deform to seal a gap between the workpiece and the inner support member upon the urging of the workpiece against the inner and outer support members.