SUB-MOUNT, METHOD OF MANUFACTURING THE SAME, SEMICONDUCTOR LASER DEVICE, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method capable of surely clogging a micro pipe.SOLUTION: A method of manufacturing a sub-mount includes the steps of: preparing a single crystal SiC which has an upper surface 10a and a lower surface 10b and includes a micro pipe 11 penetrating through from the upper surface 10a to the lower surface 10b; forming a first seed layer 21 made of a metal material on the upper surface 10a of the single crystal SiC; and forming a first plating layer 31 in the first seed layer 21 so as to clog the upper end of the micro pipe 11 by an electrolytic plating method.SELECTED DRAWING: Figure 1