MICROSCOPE HAVING LOW DISTORTION ERROR

摘要

Beam-deflecting units in light scanning microscopes are typically arranged in planes conjugate to the objective pupil. The scanning optical unit, which is required in order to produce the conjugate pupil planes, is complex and light-inefficient, because the scanning optical unit must compensate for different imaging errors such as field curvature and lateral chromatic aberration. The problem addressed by the invention is that of enabling higher image quality, simpler adjustment, and lower loss of light. This problem is solved in that the optical system comprises a concave mirror (36) for imaging points of the first beam-deflecting unit (30A) and respective points of the second beam-deflecting unit (30B) to each other, wherein the concave mirror (36) and the first beam-deflecting unit (30A) and the second beam-deflecting unit (30B) are arranged in such a way that the illumination beam path is reflected exactly once at the concave mirror (36) and a first distortion caused by the concave mirror (36) when the illumination beam path is reflected at the concave mirror and a second distortion of the image caused by the first and the second beam-deflecting units (30A, 30B) at least partially compensate each other.