发明名称 太陽電池モジュールの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a solar battery module being uniform in color by manufacturing a substrate for solar battery, with reflectivity of a reflection preventing film being within a tolerable range, efficiently, effectively, without wasting a substrate.SOLUTION: A method of manufacturing a solar battery module includes a step for film-forming reflection preventing films at the same time on a plurality of solar battery substrates by using a plasma CVD device. In the step, firstly the reflection preventing film is film-formed on the plurality of solar battery substrates. A substrate including a reflection preventing film having a minimum film thickness is selected. A manufacture condition with the plasma CVD device is acquired which provides a film thickness of the reflection preventing film of the substrate having minimum reflectivity. In a case where a reflection preventing film is film-formed on the plurality of solar battery substrates under the manufacture condition by repeating film-forming of the reflection preventing film thereafter under the manufacture condition, the substrate of which a reflection preventing film of minimum film thickness has minimum reflectivity is formed and substrates are collected of which reflectivity, film color, or film thickness of the reflection preventing film including the substrate are within a tolerable range, and the solar battery module is manufactured using the substrates.
申请公布号 JP5920421(B2) 申请公布日期 2016.05.18
申请号 JP20140168414 申请日期 2014.08.21
申请人 信越化学工業株式会社 发明人 斎須 重徳;渡部 武紀;大塚 寛之
分类号 H01L31/0216 主分类号 H01L31/0216
代理机构 代理人
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