プローブカード及びプローブカードの製造方法

摘要

PROBLEM TO BE SOLVED: To provide a probe card which ensures excellent high frequency characteristics while achieving a narrow pitch of probe needles.SOLUTION: A probe card 1 includes: a coaxial cable 3 extending from an input side to an output side; a prove needle 4 which is connected with the coaxial cable 3 and extends from it and whose distance from other probe needles 4 becomes shorter toward the output side; and a coaxial tube 6 which covers the prove needle 4 and which has a smaller diameter than the coaxial cable 3.