发明名称 METHOD FOR FORMING FINE PATTERN, AND FINE PATTERN FORMED USING SAME
摘要 This invention relates to a method of forming a fine pattern, and more particularly, to a method of forming a fine pattern using only sputtering, which enables the fine pattern to be simply formed at low cost, thus exhibiting superior productivity and economic benefits.
申请公布号 EP2903018(A4) 申请公布日期 2016.05.18
申请号 EP20130841594 申请日期 2013.09.26
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 SONG, YOUNG SIK
分类号 H01L21/203;C23C14/12;C23C14/34 主分类号 H01L21/203
代理机构 代理人
主权项
地址