发明名称 Anti-slip end effector for transporting workpiece using van der waals force
摘要 An anti-slip end effector for transporting a workpiece, configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; and at least one anti-slip protrusion disposed in the workpiece-supporting area for supporting a backside of the workpiece, said anti-slip protrusion having a top face capable of contacting and adhering to the backside of the workpiece by van der Waals force and capable of pivoting on a pivot axis, said pivot axis being disposed away from a center of the top face as viewed from above.
申请公布号 US9343350(B2) 申请公布日期 2016.05.17
申请号 US201414244689 申请日期 2014.04.03
申请人 ASM IP Holding B.V. 发明人 Arai Izumi
分类号 H01L21/687;H01L21/677 主分类号 H01L21/687
代理机构 Snell & Wilmer LLP 代理人 Snell & Wilmer LLP
主权项 1. An anti-slip end effector for transporting a workpiece, configured to be attached to a robotic arm and comprising: a workpiece-supporting area for placing a workpiece thereon for transportation; and at least one anti-slip protrusion disposed in the workpiece-supporting area for supporting a backside of the workpiece, said anti-slip protrusion having a top face capable of contacting and adhering to the backside of the workpiece by van der Waals force and capable of pivoting on a pivot axis, said pivot axis being disposed away from a center of the top face as viewed from above, wherein: the anti-slip protrusion has (i) a base portion through which the pivot axis passes, and (ii) a top portion formed directly or indirectly on top of the base portion and extending in one direction roughly parallel to the workpiece-supporting area, wherein a top surface of the top portion constitutes the top face, the workpiece-supporting area has a recess inside which the base portion of the anti-slip protrusion is disposed, a backside of the top portion of the anti-slip protrusion is in contact with a surface of the workpiece-supporting area when the workpiece is placed on the top face of the top portion at a lowest position, and the anti-slip protrusion is capable of pivoting in a manner moving the backside of the top portion of the anti-slip protrusion entirely away from the surface of the workpiece-supporting area as the workpiece is moving upward from the lowest position, the top face formed on the top portion of the anti-slip protrusion has a contacting area which is brought into contact with the backside of the workpiece when the workpiece is placed on the workpiece-supporting area, wherein the contacting area is located between the pivot axis and the end of the top portion on the extended side as viewed from above, and the top face formed on the top portion of the anti-slip protrusion is curved between the contacting area and a front end of the top portion on the extended side, and the center of gravity of the anti-slip protrusion is disposed between the pivot axis and the front end of the top portion on the curved, extended side as viewed from above.
地址 Almere NL