Substrate holders for uniform reactive sputtering

摘要

A substrate holder for a substrate including a frame body having an opening for the placement of the substrate. The frame body also includes a hollow portion therein. The substrate holder may be used in a sputtering apparatus for sputtering material onto the substrate. The substrate holder is particularly advantageous in the manufacturing of magnetic recording medium.

主权项

1. A holder for a substrate, the holder comprising:
a frame body; an arm attached at a proximal end to the frame body and extending longitudinally therefrom, the arm at a distal end defining a thin walled hollow section within the arm formed by a peripheral wall of the arm having a substantially constant wall thickness; and a clip attached to the distal end of the arm that is configured for supportingly engaging the substrate.