| 发明名称 | Measuring apparatus | ||
| 摘要 | A measuring apparatus includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light. The measuring apparatus comprises a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space which accommodates the light projecting and receiving device, and configured to transmit the light; a first regulator configured to regulate temperature of the first space to a first temperature by flowing a gas through the first space; and a second regulator configured to regulate temperature of the second space to a second temperature different from the first temperature by flowing a gas through the second space. The partition includes a plurality of partition walls disposed with a gap. | ||
| 申请公布号 | US9341468(B2) | 申请公布日期 | 2016.05.17 |
| 申请号 | US201314343606 | 申请日期 | 2013.11.03 |
| 申请人 | CANON KABUSHIKI KAISHA | 发明人 | Nishikawara Tomofumi;Yamamoto Takahiro |
| 分类号 | G01B11/24;G01B5/00 | 主分类号 | G01B11/24 |
| 代理机构 | Rossi, Kimms & McDowell LLP | 代理人 | Rossi, Kimms & McDowell LLP |
| 主权项 | 1. A measuring apparatus that includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light, the measuring apparatus comprising: a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space that accommodates the light projecting and receiving device, and configured to transmit light; a first regulator configured to regulate a temperature of the first space to a first temperature by flowing gas through the first space; and a second regulator configured to regulate a temperature of the second space to a second temperature different from the first temperature by flowing gas through the second space, wherein the partition includes a plurality of partition walls disposed with a gap therebetween to reduce heat transfer between the first space and the second space. | ||
| 地址 | Tokyo JP | ||