| 摘要 |
PROBLEM TO BE SOLVED: To provide a robot system capable of shortening the time when correcting positions and directions of works mounted on hands in the robot system in which two works are mounted on two hands.SOLUTION: In the robot system, an arm is moved in such a manner that a hand rotation center C1 and a virtual circle intersection C10 are matched in a vertical view, and a hand 16 and a rotary part 28 are rotated in such a manner that a an angle formed by a line segment L2 connecting the hand rotation center C1 and a first reference point DP1 and a line segment L1 connecting the first reference point DP1 and a first detection mark 2a becomes an angle θ1. A hand 17 and a rotary part 30 are rotated in such a manner that an angle formed by a line segment L4 connecting the hand rotation center C1 and a second reference point DP2 and a line segment L3 connecting the second reference point DP2 and a second detection mark 2a becomes an angle θ2. Then, a wafer 2A mounted on the rotary part 28 is mounted on the hand 16 and a wafer 2B mounted on the rotary part 30 is mounted on the hand 17.SELECTED DRAWING: Figure 5 |
