发明名称 FOREIGN MATTER REMOVAL DEVICE OF BODY TO BE WASHED AND FOREIGN MATTER REMOVAL METHOD OF THE SAME
摘要 PURPOSE: To provide a foreign matter removal device of a body to be washed and a foreign matter removal method of the body to be washed which can be housed into a compact size of such an extent as to be incorporated into a conveyance system and can easily perform the washing, permitted in a washing tank in the conventional technique, in an atmosphere such as in a way in conveyance.CONSTITUTION: A foreign matter removal device includes: a washing head having a discharge hole, a suction hole and a cover; a vacuum exhaust system which sucks washing liquid by vacuum from a suction hole and discharges the washing liquid from a liquid discharge hole; and interval adjusting means which retains a distance between the washing head and a body to be washed in a constant interval. Therein, in accordance with vacuum suction of washing liquid from the suction hole by means of the vacuum exhaust system, the washing liquid discharged from the liquid discharge hole is discharged onto the body to be washed, the foreign matter on the body to be washed is washed and is sucked from the suction hole, and the body to be washed is washed locally.SELECTED DRAWING: Figure 1
申请公布号 JP2016077936(A) 申请公布日期 2016.05.16
申请号 JP20140208935 申请日期 2014.10.10
申请人 HORON:KK 发明人 YAMADA KEIZO
分类号 B08B3/02;H01L21/304 主分类号 B08B3/02
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