| 摘要 |
PROBLEM TO BE SOLVED: To provide one scan device and an optical encoder for generating a plurality of scan signals shifted in phase relating to a phase position with one scale main body movable in at least one measurement direction to this scan device, in which a phase of the generated scan signal shifted in phase depends on a wavelength, and the scan device includes dividing means for separating a partial beam flux incident on this detection device according to a wavelength and one photoelectric detection array.SOLUTION: The dividing means 51; 151; 251; and 351 are constituted as asymmetrical interferometers. The interferometer includes two branch interference roads A, B, and the recombined partial beam fluxes propagate inside these optical path lengths before the recombined partial beam fluxes reach the detection arrays 53; 153; 253; and 353.SELECTED DRAWING: Figure 1 |
