发明名称 BITE CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a bite cutting device capable of turning and cutting even a workpiece of which the outer circumference is warped up, while sucking and holding the workpiece by a chuck table.SOLUTION: A bite cutting device is configured to turn and cut, with a bite tool, a surface of a tabular workpiece formed from a device region in which a plurality of devices are disposed and an end material region in an outer circumference of the device region. The bite cutting device comprises: the chuck table which sucks and holds the workpiece on a holding surface; cutting means for turning and cutting the workpiece that is held by the chuck table, with a bite wheel including a bite tool that is mounted in a tip of a spindle; work feeding means for relatively moving the chuck table and the cutting means in parallel with the holding surface; and correction means which is positioned outside of the holding surface in the workpiece that is sucked and held by the chuck table, and pushes down the end material region of the workpiece. A height of the end material region that is pushed down by the correction means, is corrected into a height equal to or less than a height of the device region of the workpiece held by the holding surface.SELECTED DRAWING: Figure 1
申请公布号 JP2016082191(A) 申请公布日期 2016.05.16
申请号 JP20140215185 申请日期 2014.10.22
申请人 DISCO ABRASIVE SYST LTD 发明人 KAWASE MASAYUKI
分类号 H01L21/304;B23D5/02 主分类号 H01L21/304
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