发明名称 CLEANING SHEET AND METHOD FOR PRODUCING CLEANING SHEET
摘要 PROBLEM TO BE SOLVED: To provide a cleaning sheet that makes it possible to maintain uniform polishing performance in the cleaning sheet.SOLUTION: A cleaning sheet 10 comprises a base material 11, and a polishing layer 12 that comprises a resin having abrasive grains dispersed therein and is disposed on the base material 11, where the polishing layer 12 has a first area 12a having a first hardness and a second area 12b having a second hardness greater than the first hardness.SELECTED DRAWING: Figure 7
申请公布号 JP2016078202(A) 申请公布日期 2016.05.16
申请号 JP20140214544 申请日期 2014.10.21
申请人 SOCIONEXT INC 发明人 TASHIRO KAZUHIRO
分类号 B24D3/00;B24D11/00;G01R31/26;H01L21/66 主分类号 B24D3/00
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