| 摘要 |
PROBLEM TO BE SOLVED: To provide a positive displacement pump capable of accurately and rapidly detecting abnormal operation.SOLUTION: A positive displacement pump 10 includes a pump chamber (for example, an outer member) 30, a motion member (for example, an inner member) 20 for transferring fluid in accordance with motion in the pump chamber 30, and abnormal operation detecting means 40 for detecting abnormal operation. The abnormal operation detecting means 40 includes a sensor section 41 transmitting a microwave toward the motion member 20 and receiving a reflection wave thereof, and a determination section 42 for determining the abnormal operation based on a signal output from the sensor section 41, and the sensor section 41 is arranged so as to transmit and receive the microwave in a state that the fluid in the pump chamber 30 is interposed between the sensor section 41 and the motion member 20.SELECTED DRAWING: Figure 1 |
