Multilevel Fabricators

摘要

The present invention provides various aspects for supporting multilevel fabricators. In some examples, the multilevel fabricators may include a cleanspace region for moving work material. In some examples, panels of filters may be positioned to support the cleanspace. In some embodiments existing processing equipment and automation are placed into the new environment. In other embodiments the processing equipment is placed and new automation equipment is used. Automated tool placement equipment may be used to place the equipment. In some examples, automated tool handling equipment may be used to remove and replace processing equipment into the multilevel fabricator.

主权项

1) A method for forming a cleanspace fabricator, said method comprising:
constructing a cleanspace fabricator structure wherein at least a primary cleanspace is included wherein an air source provides air flow through the primary cleanspace in a direction from a first vertical wall to a second vertical wall and through at least a portion of the first vertical wall and through at least a portion of the second vertical wall; placing panels of air source elements into the cleanspace fabricator structure; obtaining a first processing tool, wherein the first processing tool previously occupied a location within a clean room fabricator, and wherein within the clean room fabricator processed a first substrate; placing existing designs of processing tools into said cleanspace fabricator structure; and configuring an automation system to move production units from one process tool to another.