| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic solvent suitable for cleaning of a polydimethylsiloxane imprint mold.SOLUTION: In a method for cleaning an imprint mold made of a silicone-based resin such as polydimethylsiloxane, an organic solvent arranged so that the swelling rate of the imprint mold is 10-30% in a case where the imprint mold is immersed in the organic solvent at a temperature of 23°C for five minutes is used for cleaning the imprint mold. As concrete example of the organic solvent, it is preferably at least one kind of ketone solvent selected from a group consisting of acetone, methyl ethylketone, methyl isobutyl ketone and cyclohexanone.SELECTED DRAWING: None |
