FLASH CELL AND FLASH CELL SET

摘要

A flash cell includes a gate, a source/drain and a selector. The gate is disposed on a substrate, wherein the gate includes a control gate disposed on the substrate and a floating gate sandwiched by the control gate and the substrate. The source/drain is disposed in the substrate beside the gate. The selector electrically connects the source/drain, wherein the selector includes a bottom electrode, a resistance threshold switching material layer and a top electrode, and the resistance threshold switching material layer is sandwiched by the bottom electrode and the top electrode. A flash cell set includes a plurality of said flash cells. The flash cells electrically connect to each other by their selectors, and all of the selectors electrically connect to one same bit line.

主权项

1. A flash cell, comprising:
a gate disposed on a substrate, wherein the gate comprises a control gate disposed on the substrate and a floating gate sandwiched by the control gate and the substrate; a source/drain disposed in the substrate beside the gate; and a selector electrically connecting the source/drain and only disposed in a first dielectric layer physically contacting the substrate, wherein the selector comprises a bottom electrode, a resistance threshold switching material layer and a top electrode, and the resistance threshold switching material layer is sandwiched by the bottom electrode and the top electrode.