| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistance change element capable of being operated repeatedly while maintaining a high ON/OFF ratio.SOLUTION: In a two terminal element whose resistance changes by oxygen vacancies moving in metal oxide through an electric field, among two metal electrodes sandwiching a metal oxide layer TaOx, a SiOlayer is inserted between one metal electrode Pt and the metal oxide layer TaOx. By the structure, a conductive filament grows in the metal oxide layer and even when almost reaches the opposing electrode, voltage applied to the element does not concentrate in a remaining metal oxide portion X having high resistance but also distributes to the SiOlayer by a significant amount, thereby insulation breakdown of the portion X is prevented. The inhibition characteristics represented by the insulation breakdown portion growing due to the repeated ON/OFF operations is thereby prevented from being rapidly deteriorated by the voltage distribution to the SiOlayer immediately before the ON operation.SELECTED DRAWING: Figure 6 |
