发明名称 FIRING JIG AND FIRING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a firing jig and a firing method which allow the whole of a substrate to be uniformly contracted and heated.SOLUTION: A firing jig according to one aspect of an embodiment includes a setter having a mounting surface on which an object to be fired is mounted. When the mounting surface of the setter is viewed from the top, the thermal capacity per unit area in a central part of a mounting area in which the object to be fired is mounted is smaller than the thermal capacity per unit area in a part other than the central part of the mounting area.SELECTED DRAWING: Figure 6
申请公布号 JP2016074561(A) 申请公布日期 2016.05.12
申请号 JP20140206396 申请日期 2014.10.07
申请人 MITSUI MINING & SMELTING CO LTD 发明人 UCHIDA TATSUHIKO;TSUTSUMI HIDEKI;UCHINO TETSUYA
分类号 C04B35/64;F27D3/12 主分类号 C04B35/64
代理机构 代理人
主权项
地址