MEASUREMENT VALUE CORRECTION METHOD, COMPUTER-READABLE RECORDING MEDIUM, AND MEASUREMENT DEVICE

摘要

A measurement value correction method according to the present invention is a measurement value correction method for correcting a measurement value obtained by tracing a surface of a work piece with a stylus, and including a step of preparing a plurality of work pieces made from same design data, a step of adopting one of the work pieces as a master work piece and obtaining a reference measurement value with the stylus, a step of obtaining calibration data based on a difference between the reference measurement value and the design data, a step of adopting one of the plurality of work pieces other than the master work piece as a measurement target work piece and obtaining a target measurement value with the stylus, and a step of obtaining a corrected measurement value by correcting the target measurement value by using the calibration data.

主权项

1. A measurement value correction method for correcting a measurement value obtained by tracing a surface of a work piece with a stylus,
the measurement value correction method comprising: a step of preparing a plurality of work pieces made from same design data; a step of adopting one of the work pieces as a master work piece and obtaining a reference measurement value with the stylus; a step of obtaining calibration data based on a difference between the reference measurement value and the design data; a step of adopting one of the plurality of work pieces other than the master work piece as a measurement target work piece and obtaining a target measurement value with the stylus; and a step of obtaining a corrected measurement value by correcting the target measurement value by using the calibration data.