发明名称 PETRI DISH FOR SPIN COATING
摘要 PROBLEM TO BE SOLVED: To provide a Petri dish for spin coating capable of making coating thickness by spin coating uniform.SOLUTION: A Petri dish for spin coating according to the present invention comprises: a bottom part; and a sidewall erected on an outer peripheral edge of the bottom part, in which the bottom part has a spin coating table in the central region, the bottom part has a recess around the spin coating table, and the Petri dish for spin coating is used in the state where liquid is coated on the spin coating table by spin coating.SELECTED DRAWING: Figure 1
申请公布号 JP2016073240(A) 申请公布日期 2016.05.12
申请号 JP20140206532 申请日期 2014.10.07
申请人 SEKISUI CHEM CO LTD 发明人 AKAGI YOSHINORI;NOMURA SHIGERU;SHIKAGE TAKASHI;KONO TAKAMASA;IMAMURA KAZUHIKO
分类号 C12M1/22 主分类号 C12M1/22
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