发明名称 REUSABLE SUBSTRATE CARRIER
摘要 In some embodiments, a substrate carrier for holding a plurality of substrates comprises a disk formed of a continuous material to a nominal dimension which is approximately a multiple of a nominal dimension of a standard substrate size used in the manufacture of light emitting diode devices. In an embodiment, the disk is formed symmetrically about a central axis and defines a substantially planar upper surface. A first pair of pockets is defined in the upper surface of the disk, wherein the disk and each of the first pair of pockets are bisected by a first reference plane passing through the central axis. A second pair of pockets is defined in the upper surface of the disk, wherein the disk and each of the second pair of pockets are bisected by a second reference plane passing through the central axis.
申请公布号 US2016133781(A1) 申请公布日期 2016.05.12
申请号 US201414538766 申请日期 2014.11.11
申请人 APPLIED MATERIALS, INC. 发明人 THIRUNAVUKARASU SRISKANTHARAJAH;Zhu Mingwei;Elumalai Karthik;Tan Thean Ming;Cao Yong;Diehl Daniel Lee;Patibandla Nag
分类号 H01L33/00 主分类号 H01L33/00
代理机构 代理人
主权项 1. A substrate carrier comprising a disk formed of a continuous material, the disk being formed symmetrically about a central axis and defining a substantially planar upper surface; a first pair of pockets defined in the upper surface of the disk and each having a first diameter, wherein the disk and each of the first pair of pockets are bisected by a first reference plane passing through the central axis; and a second pair of pockets defined in the upper surface of the disk and each having a second diameter less than the first diameter, wherein the disk and each of the second pair of pockets are bisected by a second reference plane passing through the central axis.
地址 Santa Clara CA US