发明名称 |
REUSABLE SUBSTRATE CARRIER |
摘要 |
In some embodiments, a substrate carrier for holding a plurality of substrates comprises a disk formed of a continuous material to a nominal dimension which is approximately a multiple of a nominal dimension of a standard substrate size used in the manufacture of light emitting diode devices. In an embodiment, the disk is formed symmetrically about a central axis and defines a substantially planar upper surface. A first pair of pockets is defined in the upper surface of the disk, wherein the disk and each of the first pair of pockets are bisected by a first reference plane passing through the central axis. A second pair of pockets is defined in the upper surface of the disk, wherein the disk and each of the second pair of pockets are bisected by a second reference plane passing through the central axis. |
申请公布号 |
US2016133781(A1) |
申请公布日期 |
2016.05.12 |
申请号 |
US201414538766 |
申请日期 |
2014.11.11 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
THIRUNAVUKARASU SRISKANTHARAJAH;Zhu Mingwei;Elumalai Karthik;Tan Thean Ming;Cao Yong;Diehl Daniel Lee;Patibandla Nag |
分类号 |
H01L33/00 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
1. A substrate carrier comprising
a disk formed of a continuous material, the disk being formed symmetrically about a central axis and defining a substantially planar upper surface; a first pair of pockets defined in the upper surface of the disk and each having a first diameter, wherein the disk and each of the first pair of pockets are bisected by a first reference plane passing through the central axis; and a second pair of pockets defined in the upper surface of the disk and each having a second diameter less than the first diameter, wherein the disk and each of the second pair of pockets are bisected by a second reference plane passing through the central axis. |
地址 |
Santa Clara CA US |