发明名称 ミラー駆動装置及びその駆動方法
摘要 In a mirror drive device, a first actuator section and a second actuator section are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. The upper electrode of a first actuator section includes a first electrode section and a second electrode section, and an upper electrode of a second actuator section includes a third electrode section and a fourth electrode section. The arrangements of the electrode sections correspond to stress distribution of principal stresses in the piezoelectric body in resonant mode vibration, and in a piezoelectric body portion that corresponds to positions of the first electrode section and the third electrode section and a piezoelectric body portion that corresponds to positions of the second electrode section and the fourth electrode section, stresses in opposite directions to each other are generated.
申请公布号 JP5916667(B2) 申请公布日期 2016.05.11
申请号 JP20130148569 申请日期 2013.07.17
申请人 富士フイルム株式会社 发明人 直野 崇幸
分类号 G02B26/10;B81B3/00;G02B26/08;H01L41/09;H01L41/113;H01L41/187 主分类号 G02B26/10
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