| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing container capable of housing a reticle and a semiconductor wafer together in the same container, improving transportation efficiency, and reducing equipment, costs, spaces and the like by integrating a transportation line.SOLUTION: A substrate housing container comprises: a front open box container body 1 in which plural semiconductor wafers W are aligned and housed in an upward and downward direction; a body 10 attachably/detachably opening/closing a front face of the container body 1; and a cassette 51 for a reticle housing container 30 housed in the container body 1. A robotic flange 4 for automatic transportation is mounted to a ceiling of the container body 1, and a pair of support pieces 2 supporting a semiconductor wafer W in almost parallel are opposed on both inner sides of the container body 1. Plural support pieces 2 in pairs are aligned at predetermined intervals in the upward and downward direction, so as to support supported pieces 63 respectively projecting from both sides of the cassette 51 with the pair of support pieces 2. |
