发明名称 |
TARGET, ADAPTED TO AN INDIRECT COOLING DEVICE, HAVING A COOLING PLATE |
摘要 |
A device for cooling a target, having a component that includes a cooling duct and having an additional thermally conductive plate that is detachably fastened to the cooling side of the component, the cooling side being the side on which the cooling duct exerts its cooling action, characterized in that between the additional thermally conductive plate and the cooling side of the component, a first self-adhesive carbon film is provided, which is extensively and self-adhesively glued to the one side of the additional thermally conductive plate that faces the cooling side. |
申请公布号 |
EP3017082(A1) |
申请公布日期 |
2016.05.11 |
申请号 |
EP20140737147 |
申请日期 |
2014.06.30 |
申请人 |
OERLIKON SURFACE SOLUTIONS AG, TRÜBBACH |
发明人 |
KURAPOV, DENIS;KRASSNITZER, SIEGFRIED |
分类号 |
C23C14/34;H01J37/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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