发明名称 |
METHOD AND SYSTEM FOR MODIFYING A SUBSTRATE USING A PLASMA |
摘要 |
A method and system of modifying a substrate using a plasma are described comprising providing a first electrode and a second electrode; arranging the substrate such that a portion of the substrate is between the electrodes; supplying a voltage to at least one of the electrodes so as to create a plasma discharge between the electrodes which contacts at least said portion of the substrate, moving either the substrate and/or said second electrode such that said substrate and said second electrode are being linearly displaced relative to each other along an axis of linear displacement during said movement; and wherein said second electrode is arranged relative to said axis of linear displacement such that said linear movement causes a first section of the portion of substrate to have a greater residence time between the electrodes during said linear displacement than a second section of said portion of the substrate. A method and system of modifying a substrate using a plasma is also described comprising providing a first electrode and a second electrode; arranging the substrate such that a portion of the substrate is between the electrodes; supplying a voltage to at least one of the electrodes so as to create a plasma discharge between the electrodes which contacts at least said portion of the substrate, moving either the substrate and/or said second electrode such that said substrate and said second electrode are being linearly displaced relative to each other along an axis of linear displacement during said movement; and further comprising the step of rotating either the substrate or said second electrode about an axis of rotation during said relative linear displacement along said axis, so that a first section of the portion of substrate has a greater residence time between the electrodes than a second section of said portion of substrate. |
申请公布号 |
EP3017457(A1) |
申请公布日期 |
2016.05.11 |
申请号 |
EP20140739098 |
申请日期 |
2014.07.03 |
申请人 |
INNOVATION ULSTER LIMITED |
发明人 |
BYRNE, CORMAC PATRICK;MEENAN, BRIAN JOSEPH;DOHERTY, KYLE GEORGE |
分类号 |
H01J37/32;C23C16/04;C23C16/54;H05H1/24 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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