发明名称 METHOD AND MODULE STRUCTURE FOR MANUFACTURING THIN FILM SOLAR
摘要 The purpose of the present invention is to provide a method to manufacture a thin film solar cell and a module structure of a thin film solar cell in which a photoelectric conversion efficiency, productivity, and functionality are improved. The method to manufacture a thin film solar cell comprises the steps of: depositing a transparent first rear electrode on a first surface of a transparent substrate; depositing a second rear electrode including a high-conductivity metal on the first rear electrode; performing first laser scribing to separate a double layer of the first and the second rear electrode; depositing a photo absorbing layer including selenium (Se) or sulfur (S) on the second rear electrode; performing laser scribing by emitting a laser to a second surface facing with a first surface of a transparent substrate to separate the photo absorbing layer; depositing the transparent electrode on the photo absorbing layer; and performing a third laser scribing by emitting a laser to a second surface to separate a transparent electrode. Accordingly, the present invention is capable of securing a competitiveness of a solar cell by improving a price, productivity, and accuracy of a patterning process by allowing substrate emission laser based patterning.
申请公布号 KR20160050929(A) 申请公布日期 2016.05.11
申请号 KR20140150130 申请日期 2014.10.31
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 JEONG, JEUNG HYUN;KIM, WON MOK;PARK, JONG KEUK
分类号 H01L31/0224;H01L31/18 主分类号 H01L31/0224
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