Multi-patterning system and method using pre-coloring or locked patterns

摘要

A non-transitory, computer readable storage medium is encoded with computer program instructions, such that, when the computer program instructions are executed by a computer, the computer performs a method. The method generates mask assignment information for forming a plurality of patterns on a layer of an integrated circuit (IC) by multipatterning. The mask assignment information includes, for each of the plurality of patterns, a mask assignment identifying which of a plurality of masks is to be used to form that pattern, and a mask assignment lock state for that pattern. User inputs setting the mask assignment of at least one of the plurality of patterns, and its mask assignment lock state are received. A new mask assignment is generated for each of the plurality of patterns having an “unlocked” mask assignment lock state.

主权项

1. A method comprising:
generating mask assignment information for forming a plurality of patterns on a layer of an integrated circuit (IC) by multipatterning, the mask assignment information including, for each of the plurality of patterns, a mask assignment identifying which of a plurality of masks is to be used to form that pattern, and a mask assignment lock state for that pattern; receiving user inputs setting the mask assignment of at least one of the plurality of patterns, and at least one mask assignment lock state of at least one pattern having a respective mask assignment, including allowing the user to set a mask assignment lock state of a pattern having a mask assignment to a locked state and allowing the user to set the mask assignment lock state of the pattern having the mask assignment to an unlocked state; and generating a new mask assignment for each of the plurality of patterns having an “unlocked” mask assignment lock state.