发明名称 CENTERING OF A PLATE IN A HOLDER BOTH AT ROOM TEMPERATURES AND AT HIGHER TEMPERATURES.
摘要 The invention relates to a system comprising a plate having a holder, wherein the plate is centered in the holder both at room temperatures and at higher temperatures, independently of the thermal expansion of the plate and the holder, and wherein the plate can freely expand in the holder at higher temperatures.
申请公布号 MX2015014209(A) 申请公布日期 2016.05.10
申请号 MX20150014209 申请日期 2014.04.07
申请人 OERLIKON SURFACE SOLUTIONS AG, TRÜBBACH 发明人 JOERG KERSCHBAUMER
分类号 H01J37/34;C23C14/34 主分类号 H01J37/34
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