| 摘要 |
The object of the present invention is to rapidly and accurately find out a problem of interruption of sealing performance of a sealing member and accurately detect the minimum amount of leakage before and after occurrence of a leakage. The outer circumferential part of a substrate is sealed by sealing members (66, 68), the substrate (W) is held and supported by a substrate holder (18), the interior of the inner space (R) formed inside the substrate holder is closed by the sealing members to be in an airtight state when the substrate is held and supported by the substrate holder, and a first stage leakage inspection is performed to inspect whether the inner space has a predetermined vacuum pressure after a predetermined time has passed. The inner space of the substrate holder holding and supporting the substrate passed the first stage leakage inspection is sealed, and a second stage leakage inspection is performed to inspect whether the pressure of the inner space has changed to a predetermined value or more within a predetermined time. |
