Multi-part mask for implanting workpieces

摘要

A multi-part mask has a pattern plate, which includes a planar portion that has the desired aperture pattern to be used during workpiece processing. The multi-part mask also has a mounting frame, which is used to hold the pattern plate. Prior to assembly, the pattern plate has an aligning portion, which has one or more holes through which reusable alignment pins are inserted. These alignment pins enter kinematic joints disposed on the mounting frame, which serve to precisely align the pattern plate to the mounting frame. After the pattern plate has been secured to the mounting frame, the aligning portion can be detached from the pattern plate. The alignment pins can be reused at a later time. In some embodiments, the pattern plate can later be removed from the mounting frame, so that the mounting frame may be reused.

主权项

1. A mask for use during processing of a workpiece, comprising:
a pattern plate comprising a planar portion comprising a series of apertures forming a pattern to be used during processing of said workpiece; a mounting frame comprising:
an outer perimeter onto which said planar portion is affixed; andan alignment protrusion comprising one or more kinematic joints to facilitate alignment between said mounting frame and said pattern plate; anda structural bonding agent to secure said pattern plate and said mounting frame.