发明名称 LASER ABLATION APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
摘要 An embodiment of the present invention discloses a method of manufacturing a display device, which includes the following steps of: forming a flexible substrate on one surface of a carrier substrate; forming a display element on the flexible substrate; and ablating the carrier substrate by irradiating a plurality of laser beams which are incident, at different angles, on the carrier substrate on the other surface of the carrier substrate facing the one surface of the carrier substrate, penetrate the carrier substrate, and then are focused and superimposed in a first position on a boundary surface between the carrier substrate and the flexible substrate. According to the present invention, a problem that the carrier substrate is not ablated due to laser beams being blocked by defects such as particles, stains, and scratch can be solved, and a production yield of a display device can be improved by skipping a cleaning process performed before a laser ablation process.
申请公布号 KR20160049382(A) 申请公布日期 2016.05.09
申请号 KR20140146422 申请日期 2014.10.27
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 ASAKAWA YUKINORI
分类号 H01L51/56;H01L21/268;H01L21/301;H01L27/32 主分类号 H01L51/56
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