| 摘要 |
PROBLEM TO BE SOLVED: To provide an electro-spray device capable of suppressing an irregularity in the thickness of a thin film to formed on a substrate.SOLUTION: An electro-spray device 100 deposits a solution material sprayed from a nozzle 1, into a thin film on a substrate 200. The electro-spray device 100 comprises: a plurality of arranged nozzles 1; and a dummy nozzle 3 arranged on the outer side of the arrayed nozzles 1 and applied with a predetermined voltage to restrict the electric lines of force from diverging from the nozzles 1 to the outer side.SELECTED DRAWING: Figure 1 |
