发明名称 GAS SCRUBBER
摘要 The present invention relates to a gas scrubber. The gas scrubber comprises: a case; an inlet part which is installed on one side with respect to the center of an upper portion of the case, and into which an acid and an organic gas are introduced to be collected and cleaned; an outlet part which is installed on the other side with respect to the center of the upper part of the case, and which collects and purifies a gas from the acid and organic gas have been eliminated and discharges the gas to the outside; a lower slant plate which is disposed to have a space under the inlet and outlet parts, and which delivers particles collecting the acid and organic gas to a dissolution part while purifying the same; a dissolution part which is installed on the bottom of the lower slant plate and dissolves the particles collecting the acid and organic gas; and a cooling part which is installed on one side of the case and supplies cooling water to the inlet, outlet, and dissolution parts. According to an embodiment of the present invention, the gas scrubber improves gas eliminating efficiency as well as gas condensing efficiency by supplying a liquid dispersing an acid and an organic gas at 15°C or below by the medium of water and the cooling part, and eliminates a harmful gas by selective condensation.
申请公布号 KR101618803(B1) 申请公布日期 2016.05.09
申请号 KR20150120944 申请日期 2015.08.27
申请人 PCAMF KOREA 发明人 CHOI, SEOUNG MIN
分类号 H01L21/02;B01D53/00 主分类号 H01L21/02
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