MANUFACTURING METHOD OF MOLD MANUFACTURING STRUCTURE, MANUFACTURING METHOD OF MOLD, MOLD MANUFACTURING STRUCTURE, AND MOLD

摘要

PROBLEM TO BE SOLVED: To provide a mold manufacturing structure for imprint capable of suppressing occurrence of distortion due to bonding, while stabilizing the bond strength.SOLUTION: A manufacturing method of a mold manufacturing structure has a bonding step for bonding a first planar body 10 and a second planar body 20. In the bonding step, a first metal film 16 formed on the first planar body 10 and a second metal film 26 formed on the second planar body 20 are brought into contact, so as to cause solid-phase diffusion between the first metal film 16 and second metal film 26, thus bonding the first planar body 10 and second planar body 20.SELECTED DRAWING: Figure 4