| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device capable of maintaining high accuracy.SOLUTION: A sensor device 1 includes an opening 11, a package 10 containing a storage space 12, an intermediate substrate 50 on the bottom of the storage space 12, and a sensor element 20 on the intermediate substrate 50. The intermediate substrate 50 is provided so that its outer periphery of the lower surface is on the bottom of the storage space 12 via a plurality of bumps 52, the bumps 52 includes a first bump 52a and a second bump 52b, the first bump 52a bonds the bottom of the storage space 12 and the intermediate substrate 50 to each other to fix them, and the second bump 52b is in contact with one of the bottom of the storage space 12 and the intermediate substrate 50 in a separable manner.SELECTED DRAWING: Figure 1 |
