| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum cooling device achieving space-saving and cost reduction.SOLUTION: In a vacuum cooling device having a processing tank 2 accommodating a cooled object, a vacuum generation device 1 connected to the processing tank 2 by a vacuum pipe 9 and sucking a gas in the processing tank, and heat exchangers 4, 5 for cooling the gas sucked from the processing tank by the vacuum generation device 1 on the way, and cooling the cooled object by decompressing the inside of the processing tank, the heat exchangers are constituted by successively disposing a first heat exchanger 4 and a second heat exchanger 5 in a gas suction passage, and the first heat exchanger 4 and the second heat exchanger 5 are connected through a common lower collection chamber 12. A shielding plate 6 is disposed inside of the lower collection chamber 12, so that the lower collection chamber is vertically divided by the shielding plate 6, a lower portion of the lower collection chamber is applied as a drain storage portion 16, the sucked gas flowing from the first heat exchanger 4 to the second heat exchanger 5 is passed through an upper portion of the lower collection chamber 12, and the drain generated in the first heat exchanger 4 and the second heat exchanger 5 are allowed to flow to the drain storage portion 16 below the shielding plate 6.SELECTED DRAWING: Figure 1 |
